Lam Research unveils fab maintenance robot for semiconductor production

Retrieved on: 2025-02-19 11:19:06

Tags for this article:

Semiconductor device fabrication

Wafer

Lam Research

Semiconductor fabrication plant

STMicroelectronics

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Lam Research unveils fab maintenance robot for semiconductor production. View article details on hiswai:

Summary

The article discusses Lam Research's launch of Dextro, a collaborative robot for semiconductor fabs, emphasizing its role in enhancing wafer equipment maintenance with sub-micron precision. Tags highlight semiconductor manufacturing's complexity and industry players like STMicroelectronics.

Article found on: www.cleanroomtechnology.com

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