Report of TSMC's plan to adopt EUV tools that are high-native in 2030 or later

Retrieved on: 2024-01-06 13:04:06

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Report of TSMC's plan to adopt EUV tools that are high-native in 2030 or later. View article details on HISWAI: https://game-news24.com/2024/01/06/report-of-tsmc-s-plan-to-adopt-euv-tools-that-are-high-native-in-2030-or-later/

Excerpt

This week, Intelbegan is in the process of receiving its first ASML extreme ultraviolet (EUV) lithography tool with 0.55 numerical aperture.

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