TSMC and Samsung have a problem: the per-wafer yield of their best lithography leaves a ...

Retrieved on: 2023-10-11 15:14:47

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MOSFETs

Application-specific integrated circuits

3 nm process

TSMC

Extreme ultraviolet lithography

Fin field-effect transistor

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TSMC and Samsung have a problem: the per-wafer yield of their best lithography leaves a .... View article details on hiswai:

Excerpt

Samsung began manufacturing GAAFET ICs with this integration technology in June 2022, and TSMC began large-scale production in Taiwan of 3nm chips in ...

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